au.\*:("MAHALINGAM, Pushpa")
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Mechanism and energetics of dimerization of SiH2 radicals on H-terminated Si(001)-(2 x 1) surfacesSRIRAMAN, Saravanapriyan; MAHALINGAM, Pushpa; AYDIL, Eray S et al.Surface science. 2003, Vol 540, Num 2-3, pp L623-L630, issn 0039-6028Article
Extending analog design scaling to sub-wavelength lithography: co-optimization of RET and photomasksPARIKH, Ashesh; DORRIS, Siew; SMELKO, Tom et al.Proceedings of SPIE, the International Society for Optical Engineering. 2011, Vol 7974, issn 0277-786X, isbn 978-0-8194-8533-5, 79740N.1-79740N.8Conference Paper